The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 08, 2019

Filed:

Aug. 27, 2015
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Masao Ishioka, Tokyo, JP;

Daisuke Shimoyama, Yamato, JP;

Takayuki Sumida, Kawasaki, JP;

Kei Aoki, Ebina, JP;

Yasuhiro Kawabata, Kawasaki, JP;

Naoki Inatani, Kawasaki, JP;

Tomoyuki Tezuka, Sagamihara, JP;

Jun Iwata, Kawasaki, JP;

Masaki Kurihara, Koza-gun, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/14 (2006.01); H04N 5/225 (2006.01); G02B 5/20 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); G03F 7/40 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H04N 5/2254 (2013.01); G02B 5/201 (2013.01); G03F 7/0007 (2013.01); G03F 7/20 (2013.01); G03F 7/32 (2013.01); G03F 7/40 (2013.01); H01L 27/14621 (2013.01); H01L 27/14685 (2013.01); H01L 27/14627 (2013.01);
Abstract

A method for forming a color filter array includes a step of exposing a photosensitive color filter film, a step of forming a color filter array from the color filter film by developing the color filter film using a developer, and a step of cleaning the color filter array while rotating the color filter array and moving a nozzle for spraying fluid containing liquid and gas above the color filter array in a direction intersecting with an axis of the rotation. The method reduces variation in thickness of a color filter that is generated in the cleaning step.


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