The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 08, 2019

Filed:

Jun. 04, 2014
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventors:

Richard A. Cooke, Framingham, MA (US);

George Gonnella, Pepperell, MA (US);

Sung In Moon, Chaska, MN (US);

Charles W. Extrand, Minneapolis, MN (US);

John E. Pillion, Hollis, NH (US);

Assignee:

Entegris, Inc., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 19/06 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
G01L 19/0645 (2013.01); B81B 7/0025 (2013.01);
Abstract

A sensor comprises a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, the isolator film overlaying a liquid facing surface of the adhesion layer. The isolator film may be used to protect the sensor from corrosive and high temperature fluids, for example to protect the sensor from long term exposure to hot water between 85° C. and 100° C.


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