The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2019
Filed:
Sep. 29, 2016
Applicant:
Tokyo Seimitsu Co., Ltd, Tokyo, JP;
Inventors:
Masaki Kanazawa, Tokyo, JP;
Kenji Igarashi, Tokyo, JP;
Assignee:
Tokyo Seimitsu Co., Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B24B 7/04 (2006.01); B24B 47/14 (2006.01); B24B 37/005 (2012.01); B24B 41/047 (2006.01); B24B 49/08 (2006.01); B24B 49/16 (2006.01); H01L 21/304 (2006.01);
U.S. Cl.
CPC ...
B24B 7/04 (2013.01); B24B 37/005 (2013.01); B24B 41/047 (2013.01); B24B 47/14 (2013.01); B24B 49/08 (2013.01); B24B 49/16 (2013.01); H01L 21/304 (2013.01);
Abstract
A grinding machine includes a rotatable spindle having a lower end to which a grindstone for grinding a wafer is attached; linear guides supporting the spindle slidably to a column; a spindle feeding mechanism feeding the spindle in a vertical direction; and constant-pressure feeding mechanism interposed between the spindle feeding mechanism and the column and suspending the spindle feeding mechanism. The constant-pressure feeding mechanism raises the spindle feeding mechanism in the vertical direction when a friction force acting on the grindstone is higher than a predetermined value.