The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 01, 2019

Filed:

Apr. 07, 2017
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventors:

Ting-Feng Liao, New Taipei, TW;

Yi-Chen Wang, Taichung, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2017.01); H01L 27/11556 (2017.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 23/532 (2006.01); G11C 16/04 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11556 (2013.01); G11C 16/0408 (2013.01); H01L 23/5226 (2013.01); H01L 23/5283 (2013.01); H01L 23/53204 (2013.01); H01L 23/53295 (2013.01);
Abstract

A memory device includes a semiconductor substrate, a first conductive layer, a plurality of second conductive layers, a plurality insulating layers, at least one contact plug and at least one dummy plug. The first conductive layer is disposed on the semiconductor substrate. The insulating layers are disposed on the first conductive layer. The second conductive layers are alternatively stacked with the insulating layers and insulated from the first conductive layer. The contact plug passes through the insulating layers and the second conductive layers, insulates from the second conductive layers and electrically contacts to the first conductive layer. The dummy plug, corresponds to the at least one contact plug, passes through the insulating layers and the second conductive layers, and insulates from the second conductive layers and the first conductive layer.


Find Patent Forward Citations

Loading…