The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10168617 B1

Date of Patent:

Jan. 01, 2019

Filed:

Mar. 24, 2017

Composition for forming interlayer insulating film, interlayer insulating film, method for forming interlayer insulating film pattern, and device

Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;

Inventor:

Kazuhide Uno, Kawasaki, JP;

Assignee:

TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;

Attorney:

Knobbe Martens Olson & Bear LLP

Primary Examiner:

Cynthia Hamilton

Int. Cl.

CPC ...

C09D 4/00 (2006.01); C09D 5/00 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); G03F 7/40 (2006.01); G03F 7/027 (2006.01); G03F 7/031 (2006.01); G03F 7/035 (2006.01); G03F 7/038 (2006.01); H01L 21/02 (2006.01); C08F 220/28 (2006.01); C08F 222/22 (2006.01); H01L 21/027 (2006.01); H01L 21/311 (2006.01);

U.S. Cl.

CPC ...

G03F 7/031 (2013.01); C09D 4/00 (2013.01); C09D 5/00 (2013.01); G03F 7/027 (2013.01); G03F 7/035 (2013.01); G03F 7/0388 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2004 (2013.01); G03F 7/322 (2013.01); G03F 7/40 (2013.01); H01L 21/0274 (2013.01); H01L 21/02118 (2013.01); H01L 21/02282 (2013.01); H01L 21/311 (2013.01);

Abstract

A composition for forming an interlayer insulating film including a polymerizable monomer, an imide compound represented by general formula (z-1), a reaction promoter which promotes the polymerization of the polymerizable monomer and the imide compound, and a polymerization initiator, an interlayer insulating film containing a polymerized product thereof, a method for forming an interlayer insulating film pattern, and a device including the interlayer insulating film on a support. In the formula (z-1), Rand Rrepresent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. Rrepresents a divalent organic group containing an aliphatic hydrocarbon group and/or an aromatic hydrocarbon group, Rand Rrepresent an alkyl group or an alkoxy group, and nand nare 0 or 1.

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