The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 01, 2019

Filed:

Jun. 20, 2014
Applicants:

Canon Kabushiki Kaisha, Tokyo, JP;

Canon Nanotechnologies, Inc., Austin, TX (US);

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Keiji Yamashita, Utsunomiya, JP;

Yutaka Watanabe, Shioya-gun, JP;

Takuya Kono, Kanagawa-ken, JP;

Masayuki Hatano, Kanagawa-ken, JP;

Ikuo Yoneda, Mie-ken, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 43/34 (2006.01); B29C 43/58 (2006.01); B29C 31/04 (2006.01); B29C 43/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 43/34 (2013.01); B29C 31/045 (2013.01); B29C 2043/025 (2013.01); B29C 2043/3438 (2013.01); B29C 2043/5875 (2013.01);
Abstract

Provided is an imprint apparatus that applies a resin to several locations on a substrate, brings the resin and a mold into contact, and transfers a contoured pattern formed in the mold to the resin, comprising: a controller that sets a principal axis direction according to the contoured pattern and determines the application positions of the resin based on the principal axis direction that has been set such that the distances between resin drops that have been applied so as to be separated in the principal axis direction is larger than the distances between resin drops that have been applied so as to be separated in a direction that is perpendicular to the principal axis direction; and a dispenser that applies the resin based on the application position that has been determined.


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