The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
Mar. 18, 2014
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Mark Hawkins, Phoenix, AZ (US);
Bradley Leonard Halleck, Phoenix, AZ (US);
Tom Kirschenheiter, Phoenix, AZ (US);
Benjamin Hossa, Phoenix, AZ (US);
Clay Pottebaum, Phoenix, AZ (US);
Claudio Miskys, Phoenix, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/52 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/45502 (2013.01); C23C 16/45523 (2013.01); C23C 16/45561 (2013.01); C23C 16/45574 (2013.01); Y10T 137/87249 (2015.04); Y10T 137/87877 (2015.04);
Abstract
A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems.
Published as:
US2015267299A1; KR20150108755A; TW201538780A; US10167557B2; US2019106788A1; TWI675936B; US10604847B2; KR102349875B1;