The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2018

Filed:

Sep. 14, 2017
Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventors:

Hiromichi Kuriyama, Kuwana, JP;

Yuya Matsubara, Yokkaichi, JP;

Kazunori Harada, Kawasaki, JP;

Takuya Hirohashi, Ebina, JP;

Harumi Seki, Kawasaki, JP;

Masumi Saitoh, Yokkaichi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11C 11/00 (2006.01); H01L 45/00 (2006.01); G11C 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 45/10 (2013.01); G11C 13/004 (2013.01); G11C 13/0011 (2013.01); G11C 13/0069 (2013.01); G11C 13/0097 (2013.01); H01L 45/1233 (2013.01); H01L 45/1253 (2013.01); H01L 45/146 (2013.01); G11C 2013/0045 (2013.01); G11C 2013/0078 (2013.01); G11C 2213/33 (2013.01); G11C 2213/34 (2013.01); G11C 2213/52 (2013.01); G11C 2213/56 (2013.01);
Abstract

According to one embodiment, a variable resistance element includes first and second conductive layers and a first layer. The first conductive layer includes at least one of silver, copper, zinc, titanium, vanadium, chrome, manganese, iron, cobalt, nickel, tellurium, or bismuth. The second conductive layer includes at least one of platinum, gold, iridium, tungsten, palladium, rhodium, titanium nitride, or silicon. The first layer includes oxygen and silicon and is provided between the first conductive layer and the second conductive layer. The first layer includes a plurality of holes. The holes are smaller than a thickness of the first layer along a first direction. The first direction is from the second conductive layer toward the first conductive layer. The first layer does not include carbon, or a composition ratio of carbon included in the first layer to silicon included in the first layer is less than 0.1.


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