The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
May. 05, 2016
SK Hynix Inc., Gyeonggi-do, KR;
Jung Ryul Ahn, Gyeonggi-do, KR;
SK Hynix Inc. Gyeonggi-do, , KR;
Abstract
A method of manufacturing a semiconductor device includes sequentially stacking a source sacrificial layer, an upper protective layer, and an etch stop layer, which are formed of different materials from each other, over a substrate, alternately stacking interlayer dielectric layers and gate sacrificial layers over the etch stop layer, forming a first slit which penetrates the interlayer dielectric layers and the gate sacrificial layers, wherein a bottom surface of the first slit is disposed in the etch stop layer, replacing the gate sacrificial layers with gate conductive patterns through the first slit, forming a second slit which extends from the first slit through the etch stop layer and the upper protective layer to the source sacrificial layer, and replacing the source sacrificial layer with a first source layer through the second slit.