The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
Dec. 28, 2017
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Amir Raveh, Haifa, IL;
Travis Eiles, Beaverton, OR (US);
Evgeny Gregory Nisenboim, Haifa, IL;
Patrick Pardy, Hillsboro, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/305 (2006.01); G01R 31/306 (2006.01); G01R 31/302 (2006.01); G01R 31/311 (2006.01); H01J 37/073 (2006.01); H01J 37/06 (2006.01); H01J 37/244 (2006.01); H01J 37/14 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/073 (2013.01); H01J 37/14 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/002 (2013.01); H01J 2237/04753 (2013.01); H01J 2237/14 (2013.01); H01J 2237/2448 (2013.01);
Abstract
A probe assembly for analyzing a test device that includes a housing with an electron source disposed therein for emitting primary electrons. A photon source is positioned to emit photons that strike the electron source such that when the photons strike the electron source, the electron source emits the primary electrons. Detection circuitry is provided that is configured to detect secondary electrons emitted from a test device of a test assembly and to form an excitation waveform.