The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
Jul. 09, 2015
Applicant:
Hitachi High-tech Science Corporation, Minato-ku, Tokyo, JP;
Inventors:
Assignee:
Hitachi High-Tech Science Corporation, Minato-ku, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 10/04 (2010.01); G01Q 70/04 (2010.01); G01Q 10/02 (2010.01); G01Q 20/00 (2010.01); G01Q 20/02 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/04 (2013.01); G01Q 70/04 (2013.01); G01Q 10/02 (2013.01); G01Q 20/00 (2013.01); G01Q 20/02 (2013.01);
Abstract
A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.