The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2018

Filed:

Apr. 17, 2015
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventors:

Stenio da Costa Pereira, San Diego, CA (US);

Peter K. Shogren, Chula Vista, CA (US);

Rocky D. Gipson, San Marcos, CA (US);

Assignee:

Entegris, Inc., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/04 (2006.01); B01D 53/26 (2006.01);
U.S. Cl.
CPC ...
B01D 53/0415 (2013.01); B01D 53/0423 (2013.01); B01D 53/0446 (2013.01); B01D 53/261 (2013.01); B01D 2253/102 (2013.01); B01D 2253/104 (2013.01); B01D 2253/108 (2013.01); B01D 2253/25 (2013.01); B01D 2256/26 (2013.01); B01D 2258/0216 (2013.01);
Abstract

High-purity gas purifiers for purification of corrosive gases, such as halogen gases or halide gases, and noncorrosive gases, such as hydrogen and inert gases, methods of making and methods of using the gas purifiers, are described. The gas purifier includes a housing made of nickel or stainless steel. Within the housing, the gas purifier includes a purifier resin, including a modifier coated onto a substrate. The gas purifier further includes porous nickel membranes located at the inlets and outlets of the device. The inlets and outlets are capable of fluid communication with external fixtures.


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