The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2018
Filed:
Jun. 28, 2017
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Kuei-Ming Chang, New Taipei, TW;
Rei-Jay Hsieh, Miaoli County, TW;
Cheng-Han Wu, Hsinchu, TW;
Chie-Iuan Lin, Hsinchu County, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
A semiconductor device includes a substrate, a first source/drain feature, a second source/drain feature and a dielectric plug. The substrate has a semiconductor fin. The first source/drain feature is embedded in the semiconductor fin. The second source/drain feature is embedded in the semiconductor fin. The dielectric plug extends from above the semiconductor fin into the semiconductor fin. The dielectric plug is in between the first source/drain feature and the second source/drain feature. The dielectric plug is separated from the first source/drain feature and the second source/drain feature.