The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2018
Filed:
May. 28, 2014
Applicant:
Sigma-aldrich Co., Llc., St. Louis, MO (US);
Inventors:
Ravi Kanjolia, North Andover, MA (US);
Shaun Garratt, Wirral, GB;
Assignee:
Merck Patent GmbH, Darmstadt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C07F 13/00 (2006.01); B01J 31/00 (2006.01); C07F 17/00 (2006.01); C23C 16/18 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C07F 13/005 (2013.01); B01J 31/00 (2013.01); C07F 17/00 (2013.01); C23C 16/18 (2013.01); C23C 16/45553 (2013.01);
Abstract
Manganese complexes, methods of making the same, and use thereof in thin film deposition, such as CVD and ALD are provided herein.