The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2018
Filed:
Apr. 01, 2016
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25G 1/04 (2006.01); B25G 3/36 (2006.01); B25G 1/00 (2006.01); B08B 1/00 (2006.01); B08B 3/02 (2006.01); B08B 13/00 (2006.01); B08B 5/02 (2006.01);
U.S. Cl.
CPC ...
B25G 1/04 (2013.01); B08B 1/00 (2013.01); B08B 1/002 (2013.01); B08B 1/005 (2013.01); B08B 3/026 (2013.01); B08B 5/02 (2013.01); B25G 1/005 (2013.01); B25G 3/36 (2013.01); B08B 13/00 (2013.01);
Abstract
In some embodiments, a maintenance apparatus is provided for maintaining semiconductor processing equipment. The maintenance apparatus has an articulated member having a first member with a handle engagement portion and a second member with a first tool engagement portion. The first member is rotationally coupled to the first member about an articulation axis. A first tool member in selective engagement with the first tool engagement portion of the second member.