The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Aug. 03, 2015
Applicant:
Toyota Jidosha Kabushiki Kaisha, Toyota-shi, Aichi-ken, JP;
Inventors:
Jun Saito, Toyota, JP;
Tatsuji Nagaoka, Toyota, JP;
Sachiko Aoi, Nagakute, JP;
Yukihiko Watanabe, Nagakute, JP;
Shinichiro Miyahara, Nagoya, JP;
Takashi Kanemura, Kariya, JP;
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA, Toyota, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 29/12 (2006.01); H01L 29/739 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4236 (2013.01); H01L 29/06 (2013.01); H01L 29/12 (2013.01); H01L 29/42368 (2013.01); H01L 29/42376 (2013.01); H01L 29/78 (2013.01); H01L 29/7813 (2013.01); H01L 29/7397 (2013.01);
Abstract
The bottom surface of the trench is provided so that a center part of the bottom surface protrudes upward with respect to a peripheral part of the bottom surface in a short direction. A thickness of the gate insulating film covering the peripheral part is thicker than a thickness of the gate insulating film covering the center part.