The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Aug. 11, 2017
Lam Research Corporation, Fremont, CA (US);
Theodoros Panagopoulos, Los Gatos, CA (US);
Richard Gould, Fremont, CA (US);
Edmundo Reyes, Fremont, CA (US);
John Boniface, San Jose, CA (US);
Ivan Berry, Green Valley, AZ (US);
Alexander Dulkin, Sunnyvale, CA (US);
Bart van Schravendijk, Palo Alto, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An apparatus for transporting or storing at least one semiconductor wafer in an ultra-high vacuum is provided. A portable vacuum transfer pod is provided comprising an internal wafer storage chamber for storing one or more wafers and a wafer support for supporting at least one wafer within the internal wafer storage chamber. A passively capable vacuum pump capable of passive vacuum pumping is in fluid connection with the internal wafer storage chamber and is mechanically connected to the portable vacuum transfer pod. A shut off valve for opening and closing the fluid connection is between the passively capable vacuum pump and the internal wafer storage chamber.