The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Nov. 22, 2016
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventor:
Dirk Woll, San Jose, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 2/02 (2006.01); H01L 21/66 (2006.01); F27D 21/02 (2006.01); G01N 21/95 (2006.01); G03F 1/84 (2012.01); H01L 21/67 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); F27D 21/02 (2013.01); G01N 21/9501 (2013.01); G03F 1/84 (2013.01); G03F 7/7065 (2013.01); H01L 21/67288 (2013.01);
Abstract
A cartridge in an oven enclosure includes a pre-heating feature for an incoming purge gas before the purge gas enters the space around an optical component, such as a nonlinear optical crystal, in an oven cell. The incoming purge gas can be pre-heated as it travels along a gas pathway around a cartridge. The cartridge can include a heater. The oven enclosure can have two windows positioned such that a laser beam can enter through one of the windows, pass through the optical component, and exit through another of the windows. A second harmonic beam can be generated with the optical component.