The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Jun. 27, 2016
Applicant:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Inventors:

Ferruccio Frisina, S. Agata Li Battiati, IT;

Giuseppe Abbondanza, San Giovanni la Punta, IT;

Assignee:

STMICROELECTRONICS S.R.L., Agrate Brianza, IT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/10 (2006.01); H01L 21/78 (2006.01); C30B 33/00 (2006.01); C30B 33/06 (2006.01); H01L 21/02 (2006.01); C30B 9/06 (2006.01); C30B 19/04 (2006.01); C30B 19/08 (2006.01); C30B 19/12 (2006.01); C30B 29/36 (2006.01); C23C 16/01 (2006.01); C23C 16/02 (2006.01); C23C 16/32 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/7806 (2013.01); C23C 16/01 (2013.01); C23C 16/0218 (2013.01); C23C 16/325 (2013.01); C23C 16/4583 (2013.01); C30B 9/06 (2013.01); C30B 19/04 (2013.01); C30B 19/08 (2013.01); C30B 19/12 (2013.01); C30B 29/36 (2013.01); C30B 33/00 (2013.01); C30B 33/06 (2013.01); H01L 21/02381 (2013.01); H01L 21/02529 (2013.01); H01L 21/02609 (2013.01);
Abstract

An embodiment described herein includes a method for producing a wafer of a first semiconductor material. Said first semiconductor material has a first melting temperature. The method comprises providing a crystalline substrate of a second semiconductor material having a second melting temperature lower than the first melting temperature, and exposing the crystalline substrate to a flow of first material precursors for forming a first layer of the first material on the substrate. The method further comprising bringing the crystalline substrate to a first process temperature higher than the second melting temperature, and at the same time lower than the first melting temperature, in such a way the second material melts, separating the second melted material from the first layer, and exposing the first layer to the flow of the first material precursor for forming a second layer of the first material on the first layer.


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