The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Feb. 16, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Simon Nicholas Binns, East Palo Alto, CA (US);
Brian T. West, San Jose, CA (US);
Ronald Vern Schauer, Gilroy, CA (US);
Roger M. Johnson, Livermore, CA (US);
Michael S. Cox, Gilroy, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3476 (2013.01); H01J 37/32935 (2013.01); H01J 37/3405 (2013.01); H01J 37/3414 (2013.01); H01J 37/3479 (2013.01);
Abstract
A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.