The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
May. 15, 2017
Applicant:
Applied Materials Israel Ltd., Rehovot, IL;
Inventor:
Alex Goldenshtein, Nes Ziona, IL;
Assignee:
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/073 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01); H01J 37/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/073 (2013.01); H01J 37/026 (2013.01); H01J 37/226 (2013.01); H01J 37/28 (2013.01); H01J 2237/0047 (2013.01); H01J 2237/04 (2013.01); H01J 2237/063 (2013.01); H01J 2237/2801 (2013.01); H01J 2237/2817 (2013.01);
Abstract
A method and a system for imaging an object, the system may include electron optics that may be configured to scan a first area of the object with at least one electron beam; wherein the electron optics may include a first electrode; and light optics that may be configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object.