The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Jul. 27, 2016
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Andrew Kingston, Kambah, AU;

Shane Latham, Griffith, AU;

Adrian Sheppard, Fisher, AU;

Benoit Recur, Turner, AU;

Trond Karsten Varslot, Vuku, NO;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06T 7/00 (2017.01); G06T 11/00 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0012 (2013.01); G06T 7/0024 (2013.01); G06T 11/003 (2013.01); G06T 11/005 (2013.01); G06T 2207/10072 (2013.01);
Abstract

A method for investigating a specimen using a tomographic imaging apparatus, comprising acquiring a set of input images of the specimen taken at a corresponding set of source positions that are intended to lie on an ideal locus but are instead caused by positioning errors to lie on a distorted locus, using the images to construct an initial tomographic image, dissociating the initial tomographic image into a set of reference images referenced to said ideal locus, comparing the given input images to the corresponding reference images, calculating a set of transformations necessary to map the input images onto the reference images, and using the set of transformations to construct a modified tomographic image.


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