The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Jul. 01, 2016
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Yin-Chuan Chen, Taichung, TW;

Chi-Ming Tsai, Taipei, TW;

Shin-Huang Chen, Puli Town, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G03F 1/36 (2012.01);
U.S. Cl.
CPC ...
G03F 1/36 (2013.01); G06F 17/5081 (2013.01);
Abstract

A method, of seeding an optical proximity correction (OPC) process, includes: receiving, at an input device of a computer, a subject pre-OPC design-signature for a subject pre-OPC design package; selecting, by the processor and via interaction with an OPC database operatively connected to the computer, one amongst archived post-OPC design packages based on relatedness between the subject pre-OPC design-signature and archived post-OPC design-signatures corresponding to the archived post-OPC design packages, and thereby retrieving the selected archived post-OPC design packages; and generating one or more seeds for the OPC process based on the selected archived post-OPC design package.


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