The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Oct. 20, 2017
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
CARL ZEISS SMT GMBH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 27/00 (2006.01); G02B 3/00 (2006.01); G02B 17/08 (2006.01); G02B 5/08 (2006.01); G21K 1/06 (2006.01); H01S 3/09 (2006.01);
U.S. Cl.
CPC ...
G02B 27/0025 (2013.01); G02B 3/0087 (2013.01); G02B 5/0891 (2013.01); G02B 17/0856 (2013.01); G02B 17/0892 (2013.01); G03F 7/70308 (2013.01); G03F 7/70316 (2013.01); G03F 7/70958 (2013.01); G21K 1/06 (2013.01); G21K 1/062 (2013.01); H01S 3/0903 (2013.01);
Abstract
A wavefront correction element for an optical system, in particular an optical system of a microlithographic projection exposure apparatus or a mask inspection apparatus, has a carrier film () which at least partly transmits electromagnetic radiation that has an operating wavelength of the optical system and that impinges on the carrier film during operation of the optical system. The carrier film () is configured such that the real part of the complex refractive index of the carrier film varies over a used region of the surface of the carrier film ().