The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Jul. 12, 2017
Applicant:
Uchicago Argonne, Llc, Chicago, IL (US);
Inventors:
Raymond P. Conley, Mokena, IL (US);
Jun Qian, Lemont, IL (US);
Mark J. Erdmann, Darien, IL (US);
Elina Kasman, Buffalo Grove, IL (US);
Lahsen Assoufid, Chicago, IL (US);
Scott J. Izzo, Wheeling, IL (US);
Assignee:
UChicago Argonne, LLC, Chicago, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
G01B 9/0209 (2013.01); G01B 9/02002 (2013.01); G01B 9/02022 (2013.01); G01B 9/02057 (2013.01); G01B 9/02062 (2013.01); G01B 9/02091 (2013.01); G01B 11/2441 (2013.01); G01B 2290/45 (2013.01);
Abstract
Methods and related equipment for dynamic on-axis in-situ interferometry where the reference surface is positioned in an vacuum chamber. The systems use a wavelength shifting, or a phase shifting interferometer that allows the freedom to eliminate the need to step the cavity length physically with the reference surface, allowing the reference surface to be placed inside the vacuum chamber.