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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10151574 B1

PDFFull Text
Date of Patent:
Dec. 11, 2018

Filed:

Jul. 12, 2017

Precision surface measurement in a vacuum

Applicant:

Uchicago Argonne, Llc, Chicago, IL (US);

Inventors:

Raymond P. Conley, Mokena, IL (US);

Jun Qian, Lemont, IL (US);

Mark J. Erdmann, Darien, IL (US);

Elina Kasman, Buffalo Grove, IL (US);

Lahsen Assoufid, Chicago, IL (US);

Scott J. Izzo, Wheeling, IL (US);

Assignee:

UChicago Argonne, LLC, Chicago, IL (US);

Attorney:

Foley & Lardner LLP

Primary Examiner:

Jonathan Hansen

Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
G01B 9/0209 (2013.01); G01B 9/02002 (2013.01); G01B 9/02022 (2013.01); G01B 9/02057 (2013.01); G01B 9/02062 (2013.01); G01B 9/02091 (2013.01); G01B 11/2441 (2013.01); G01B 2290/45 (2013.01);
Abstract

Methods and related equipment for dynamic on-axis in-situ interferometry where the reference surface is positioned in an vacuum chamber. The systems use a wavelength shifting, or a phase shifting interferometer that allows the freedom to eliminate the need to step the cavity length physically with the reference surface, allowing the reference surface to be placed inside the vacuum chamber.

Find Patent Forward Citations

Conley, Raymond. (2018). Precision surface measurement in a vacuum (U.S. Patent No. 10151574). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10151574

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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