The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
May. 30, 2017
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Peter Vogt, Heidenheim, DE;
Florian Bart, Aalen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
In a position measuring device () and a method for ascertaining positions of an object () to be measured, at least one capacitive position measuring sensor () provides a position measurement signal (P) relating to the object () to be measured and at least one capacitive reference measurement sensor () provides a reference measurement signal (R). The measuring sensors () are connected to a computing unit () which is embodied to calculate a position signal (P) to ascertain the positions from the position measurement signal (P) and the reference measurement signal (R). As a result of interfering influences being contained substantially equally in the position measurement signal (P) and the reference measurement signal (R) as an interference signal (S), it is possible to determine and eliminate the interference signal (S) during the calculation.