The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2018
Filed:
May. 12, 2017
International Business Machines Corporation, Armonk, NY (US);
Zhenxing Bi, Niskayuna, NY (US);
Kangguo Cheng, Schenectady, NY (US);
Peng Xu, Guilderland, NY (US);
Jie Yang, Clifton Park, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of forming complementary vertical fins and vertical fins with uniform heights, including, forming a trench in a region of a substrate, wherein the trench extends through an upper portion of the substrate and a buried punch-through stop layer, and extends into a lower portion of the substrate, forming a reformed punch-through stop layer in a bottom portion of the trench, forming a fin formation region on the reformed punch-through stop layer, and forming a complementary vertical fin from the fin formation region and a vertical fin from the upper portion of the substrate on a first region of the substrate adjacent to the second region.