The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2018
Filed:
Oct. 12, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Michael Brehm, Sulzbach-Laufen, DE;
Wolfgang Merkel, Neu-Ulm, DE;
Ulrich Weber, Ulm, DE;
Henry Wegert, Westhausen, DE;
Assignee:
CARL ZEISS SMT GMBH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/00 (2006.01); G02B 5/08 (2006.01); G02B 7/182 (2006.01); G02B 17/06 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 27/0006 (2013.01); G02B 5/0808 (2013.01); G02B 5/0891 (2013.01); G02B 7/182 (2013.01); G02B 17/0652 (2013.01); G03F 7/7015 (2013.01); G03F 7/70825 (2013.01); G03F 7/70933 (2013.01);
Abstract
An optical assembly () includes an optical element (), a mount () configured to hold the optical element (), and a plurality of fastening elements () with fastening areas () configured to fasten the optical element () to the mount (). The fastening elements () bridge an interstice () between the optical element () and the mount (), and a purge device () produces at least one purge gas flow () in the region of the optical element () such that the purge gas flow flows around the fastening areas () of the fastening elements ().