The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2018

Filed:

Mar. 16, 2016
Applicant:

Toyota Jidosha Kabushiki Kaisha, Aichi, JP;

Inventors:

Kazuaki Seki, Futtsu, JP;

Kazuhiko Kusunoki, Nishinomiya, JP;

Kazuhito Kamei, Osaka, JP;

Katsunori Danno, Susono, JP;

Hironori Daikoku, Susono, JP;

Masayoshi Doi, Nagoya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/36 (2006.01); C30B 19/10 (2006.01); H01L 21/02 (2006.01); C30B 9/06 (2006.01); C30B 19/04 (2006.01);
U.S. Cl.
CPC ...
C30B 19/10 (2013.01); C30B 9/06 (2013.01); C30B 19/04 (2013.01); C30B 29/36 (2013.01); H01L 21/02378 (2013.01); H01L 21/02529 (2013.01); H01L 21/02625 (2013.01); H01L 21/02628 (2013.01);
Abstract

Provided is a method for producing a SiC single crystal which can suppress generation of SiC polycrystals. The method according to the present embodiment is in accordance with a solution growth method. The method for producing a SiC single crystal according to the present embodiment comprises a power-output increasing step, a contact step, and a growth step. In the power-output increasing step, high-frequency power output of an induction heating device is increased to crystal-growth high-frequency power output. In the contact step, a SiC seed crystal is brought into contact with a Si—C solution. The high-frequency power output of the induction heating device in the contact step is more than 80% of the crystal-growth high-frequency power output. The temperature of the Si—C solution in the contact step is less than a crystal growth temperature. In the growth step, the SiC single crystal is grown at the crystal growth temperature.


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