The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2018

Filed:

Jan. 29, 2009
Applicants:

Takahiro Mizuno, Komaki, JP;

Yoshihiro Izawa, Kakamigahara, JP;

Tomohiko Akatsuka, Ichinomiya, JP;

Inventors:

Takahiro Mizuno, Komaki, JP;

Yoshihiro Izawa, Kakamigahara, JP;

Tomohiko Akatsuka, Ichinomiya, JP;

Assignee:

FUJIMI INCORPORATED, Kiyosu-shi, Aichi-ken, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); H01L 21/02 (2006.01); H01L 21/3105 (2006.01); H01L 21/321 (2006.01); C09K 3/14 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C09K 3/1436 (2013.01); C09K 3/1463 (2013.01); H01L 21/02024 (2013.01); H01L 21/31053 (2013.01); H01L 21/3212 (2013.01);
Abstract

A polishing composition contains a nitrogen-containing compound and abrasive grains, and the pH of the composition is in the range of 1 to 7. The nitrogen-containing compound in the polishing composition preferably has a structure expressed by a formula: R—N(—R)—Rin which R, R, and Reach represent an alkyl group with or without a characteristic group, two of Rto Rmay form a part of a heterocycle, and two of Rto Rmay be identical and form a part of a heterocycle with the remaining one. Alternatively, the nitrogen-containing compound is preferably selected from a group consisting of a carboxybetaine type ampholytic surfactant, a sulfobetaine type ampholytic surfactant, an imidazoline type ampholytic surfactant, and an amine oxide type ampholytic surfactant. A polishing composition may contain a water-soluble polymer and abrasive grains, and the pH of the composition is in the range of 1 to 8.


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