The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 27, 2018

Filed:

Nov. 14, 2017
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Inventors:

Shunpei Yamazaki, Tokyo, JP;

Kiyoshi Kato, Kanagawa, JP;

Yuta Endo, Kanagawa, JP;

Ryo Tokumaru, Kanagawa, JP;

Assignee:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 21/02 (2006.01); H01L 21/443 (2006.01); H01L 21/4757 (2006.01); H01L 27/108 (2006.01); H01L 29/10 (2006.01); H01L 29/786 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1225 (2013.01); H01L 21/0228 (2013.01); H01L 21/02274 (2013.01); H01L 21/443 (2013.01); H01L 21/47573 (2013.01); H01L 27/10802 (2013.01); H01L 27/1255 (2013.01); H01L 27/1262 (2013.01); H01L 29/1054 (2013.01); H01L 29/7869 (2013.01); H01L 29/78648 (2013.01); H01L 29/42384 (2013.01); H01L 29/78696 (2013.01);
Abstract

A semiconductor device having favorable electric characteristics is provided. The semiconductor device includes a first transistor and second transistor. The first transistor includes a first conductor over a substrate; a first insulator thereover; a first oxide thereover; a second insulator over thereover; a second conductor including a side surface substantially aligned with a side surface of the second insulator and being over the second insulator; a third insulator including a side surface substantially aligned with a side surface of the second conductor and being over the second conductor; a fourth insulator in contact with a side surface of the second insulator, a side surface of the second conductor, and a side surface of the third insulator; and a fifth insulator in contact with the first oxide and the fourth insulator. The second transistor includes a third conductor; a fourth conductor at least part of which overlaps with the third conductor; and a second oxide between the third conductor and the fourth conductor. The third conductor and the fourth conductor are electrically connected to the first conductor.


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