The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2018
Filed:
Sep. 12, 2017
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Jan Horn, Munich, DE;
Stefan Tuerk, Endingen, DE;
Oscar Noordman, Vught, NL;
Ulrich Bihr, Kirchheim/Dirgenheim, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G03F 7/20 (2006.01); H02K 41/035 (2006.01); H02K 49/04 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); G02B 26/0841 (2013.01); G03F 7/702 (2013.01); H02K 41/035 (2013.01); H02K 49/04 (2013.01);
Abstract
A multi-mirror array including displaceable mirror elements includes a passive electric damping mechanism for damping disturbances of the displacement positions of the mirror elements.