The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 27, 2018

Filed:

Jan. 26, 2016
Applicant:

Teradyne, Inc., North Reading, MA (US);

Inventors:

Michael A. Caradonna, Santa Clara, CA (US);

Daniel A. Derringer, San Jose, CA (US);

Stephen R. Wilkinson, Gilroy, CA (US);

Assignee:

Teradyne, Inc., North Reading, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G01R 31/319 (2006.01); G06F 1/00 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 31/31905 (2013.01); G01R 31/2889 (2013.01); G01R 31/31926 (2013.01); G01R 31/2874 (2013.01); G06F 1/00 (2013.01); H01L 21/00 (2013.01); H01L 2221/00 (2013.01);
Abstract

A tester interface unit comprising a test hardware module. The test hardware module may have a simple construction, relying on control and/or signal processing in one or more tester instruments to generate or analyze test signals for a device under test. The test hardware module may be disposed within the tester interface unit, providing a short and high integrity signal path length to the device under test. The tester interface unit may include a purge gas chamber and a cooling chamber, with the hardware module penetrate a separator between those chambers, sealing an opening between the purge gas chamber and the cooling chamber. A heat spreader may move heat generated on the portion of the test hardware module in the purge gas chamber to the cooling chamber.


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