The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2018
Filed:
Jun. 15, 2017
Applicant:
Asahi Glass Company, Limited, Chiyoda-ku, JP;
Inventors:
Assignee:
AGC Inc., Chiyoda-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/36 (2006.01); C30B 25/18 (2006.01); C30B 23/02 (2006.01); C09G 1/04 (2006.01); H01L 21/02 (2006.01); C30B 33/00 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
C09G 1/04 (2013.01); C30B 29/36 (2013.01); C30B 33/00 (2013.01); H01L 21/02024 (2013.01); H01L 29/1608 (2013.01); Y10T 428/24355 (2015.01);
Abstract
The present invention relates to a single-crystal silicon-carbide substrate provided with a principal surface having an atomic step-and-terrace structure containing atomic steps and terraces derived from a crystal structure, in which the atomic step-and-terrace structure has a proportion of an average line roughness of a front edge portion of the atomic step to a height of the atomic step being 20% or less.