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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10134836 B1

PDFFull Text
Date of Patent:
Nov. 20, 2018

Filed:

Mar. 31, 2017

Semiconductor device and method of fabricating the same

Applicant:

United Microelectronics Corp., Hsinchu, TW;

Inventor:

Zhi-Biao Zhou, Singapore, SG;

Assignee:

United Microelectronics Corp., Hsinchu, TW;

Attorney:

J.C. Patents

Primary Examiner:

Cheung Lee

Assistant Examiner:

Stephen C Smith

Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 27/12 (2006.01); H01L 21/762 (2006.01); H01L 23/535 (2006.01); H01L 21/84 (2006.01); H01L 29/66 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0649 (2013.01); H01L 21/76289 (2013.01); H01L 21/84 (2013.01); H01L 23/535 (2013.01); H01L 27/1203 (2013.01); H01L 28/10 (2013.01); H01L 29/66545 (2013.01);
Abstract

A semiconductor device and a method of fabricating the same are provide. The fabricating method includes providing a silicon-on-insulator (SOI) substrate that includes, from bottom to top, a substrate, a first insulating layer and a semiconductor layer. The semiconductor layer is patterned to form a plurality of dummy patterns. A second insulating layer is formed around the plurality of dummy patterns. The plurality of dummy patterns are removed to form a plurality of openings. A dielectric structure is formed on the substrate and fills into the plurality of openings.

Find Patent Forward Citations

Zhou, Zhi-Biao. (2018). Semiconductor device and method of fabricating the same (U.S. Patent No. 10134836). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10134836

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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