The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2018

Filed:

Nov. 21, 2017
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Dong Seup Lee, McKinney, TX (US);

Yoshikazu Kondo, Sachse, TX (US);

Pinghai Hao, Plano, TX (US);

Sameer Pendharkar, Allen, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/205 (2006.01); H01L 21/28 (2006.01); H01L 29/20 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/51 (2006.01); H01L 29/778 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28264 (2013.01); H01L 21/0217 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/4236 (2013.01); H01L 29/42368 (2013.01); H01L 29/518 (2013.01); H01L 29/66462 (2013.01); H01L 29/7787 (2013.01);
Abstract

In some embodiments, an apparatus includes a first layer with a first surface and a second surface opposite to the first surface. The apparatus also includes a second layer having a third surface interfacing the second surface and a fourth surface opposite the third surface. The apparatus further includes a third layer having a fifth surface interfacing the fourth surface and a sixth surface opposite the fifth surface. The apparatus also includes a fourth layer having a seventh surface interfacing the sixth surface to form a heterojunction, which generates a two-dimensional electron gas channel formed in the fourth layer. Further, the apparatus includes a recess that extends from the first surface to the fifth surface.


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