The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Jan. 09, 2017
Hseb Dresden Gmbh, Dresden, DE;
Bernd Srocka, Berlin, DE;
Stanislas Flon, Dresden, DE;
HSEB Dresden GmbH, Dresden, DE;
Abstract
A method and assembly for determining the thickness of layers of a sample stack influencing the intensity of reflected light from a light source. The thickness is determined from the intensity detected by an array detector with a plurality of detector elements in lines and columns. The detector comprises a plurality of sections in the form of parallel stripes, the stripes detecting the light reflected by the sample stack of layers simultaneously. Light of one selected wavelength range only is detected by each of the plurality of sections of the detector. The image of the sample stack on the detector or of the parallel stripes is moved in a direction perpendicular to the longitudinal direction of the parallel stripes such that each point of the sample stack is detected at least once in each of the different wavelength ranges.