The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2018
Filed:
May. 27, 2015
Applicant:
Nissan Chemical Industries, Ltd., Tokyo, JP;
Inventor:
Naoki Otani, Funabashi, JP;
Assignee:
NISSAN CHEMICAL INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); C09D 5/24 (2006.01); B05D 1/00 (2006.01); B05D 1/18 (2006.01); B05D 1/02 (2006.01); B05D 1/28 (2006.01); H01L 51/50 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0058 (2013.01); B05D 1/005 (2013.01); B05D 1/02 (2013.01); B05D 1/18 (2013.01); B05D 1/28 (2013.01); C09D 5/24 (2013.01); H01L 51/0005 (2013.01); H01L 51/0007 (2013.01); H01L 51/0026 (2013.01); H01L 51/0059 (2013.01); H01L 51/5088 (2013.01);
Abstract
Provided are a thin-film planarization method, a planarized thin-film formation method, and a thin-film formation varnish to be used in these methods, in which when forming a thin film using a thin-film formation varnish which includes an organic compound and an organic solvent, the varnish flow activation energy is set to no more than 28 kJ/mol.