The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2018
Filed:
May. 30, 2017
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
CARL ZEISS SMT GMBH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/20 (2006.01); H01L 41/04 (2006.01); G01Q 10/06 (2010.01); G03F 7/20 (2006.01); G05D 3/20 (2006.01); H02N 2/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/042 (2013.01); G01Q 10/06 (2013.01); G03F 7/70691 (2013.01); G05D 3/203 (2013.01); H01L 41/04 (2013.01); H02N 2/0075 (2013.01);
Abstract
A piezoelectric positioning device () has at least one piezoelectric actuator () having a first connection contact () and a second connection contact (). A control device () with digital/analog converters () connected to the connection contacts () is used to control the at least one piezoelectric actuator (). In comparison with a coarse converter (), a fine converter () has a comparatively smaller voltage range and lower voltage levels, with the result that a high degree of positioning accuracy can be achieved.
Kempter, Christian. (2018). Piezoelectric positioning device and positioning method by means of such a piezoelectric positioning device (U.S. Patent No. 10128429). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10128429
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile