The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 13, 2018

Filed:

Aug. 01, 2017
Applicant:

Vanguard International Semiconductor Corporation, Hsinchu, TW;

Inventors:

Cheng-Tsung Wu, Taipei, TW;

Shin-Cheng Lin, Tainan, TW;

Wen-Hsin Lin, Jhubei, TW;

Yu-Hao Ho, Keelung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/10 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 21/761 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0634 (2013.01); H01L 21/761 (2013.01); H01L 29/063 (2013.01); H01L 29/0646 (2013.01); H01L 29/1083 (2013.01); H01L 29/1095 (2013.01); H01L 29/66681 (2013.01); H01L 29/7816 (2013.01); H01L 29/7835 (2013.01);
Abstract

A high-voltage semiconductor device is provided. The device includes an epitaxial layer formed on a semiconductor substrate. The semiconductor substrate includes a first doping region having a first conductivity type. The epitaxial layer includes a body region that has a second conductivity type and a second doping region and a third doping region that have the first conductivity type. The second doping region and the third doping region are respectively on both opposite sides of the body region. A source region and a drain region are respectively in the body region and the second doping region. A gate structure is on the epitaxial layer. A fourth doping region having the second conductivity region is below the source region and adjacent to the bottom of the body region. The fourth doping region has a doping concentration greater than that of the body region.


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