The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2018
Filed:
Jun. 01, 2016
Applicant:
Veeco Instruments Inc., Plainview, NY (US);
Inventors:
Boris Druz, Brooklyn, NY (US);
Rustam Yevtukhov, Briarwood, NY (US);
Robert Hieronymi, Monroe, NY (US);
Alan V. Hayes, Great Neck, NY (US);
Mathew Levoso, Bellmore, NY (US);
Peter Porshnev, Northport, NY (US);
Assignee:
VEBCO INSTRUMENTS INC., Fairview, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01); H01J 37/305 (2006.01); H01J 27/18 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3053 (2013.01); H01J 27/18 (2013.01); H01J 37/08 (2013.01); H01J 2237/0802 (2013.01);
Abstract
The presently disclosed ion sources include one or more electromagnets for changing the distribution of plasma within a discharge space of an ion source. At least one of the electromagnets is oriented about an outer periphery of a tubular sidewall of the ion source and changes a distribution of the plasma in a peripheral region of the discharge space.