The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2018
Filed:
Mar. 12, 2015
Entegris, Inc, Billerica, MA (US);
Scott Elfstrom, Maplewood, MN (US);
Kathleen L. Hanson, Savage, MN (US);
Steven E. Haumersen, Woodbury, MN (US);
Thomas D. Johnson, Star Prairie, WI (US);
Clari Nolet, Los Altos, CA (US);
William Smeaton, Edina, MN (US);
Entegris, Inc, Billerica, MA (US);
Abstract
Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.