The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 06, 2018

Filed:

May. 08, 2017
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Bipul C. Paul, Mechanicville, NY (US);

Hajime Terazawa, Malta, NY (US);

Joseph Versaggi, Galway, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 27/11 (2006.01); G01R 31/00 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); H01L 22/14 (2013.01); H01L 27/1104 (2013.01); G01R 31/00 (2013.01); G01R 31/2856 (2013.01);
Abstract

Disclosed are an in-kerf test structure and testing method for testing an on-chip device. The structure includes at least one test component with at least one test device and adjoining dummy devices connected to the test device. Each adjoining dummy device has proximal node(s) directly connected to a test device and distal node(s) that are not directly connected to a test device. The nodes of each test device and the distal nodes of each adjoining dummy device are connected to input/output pads. During testing the input/output pads are used to bias the nodes of a selected test device as well as the distal node(s) of any adjoining dummy device. By biasing the distal node(s) of an adjoining dummy device, random accumulation of potential thereon is avoided and current contributions from the adjoining dummy device(s) to a current measurement taken from the selected test device can be accurately determined.


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