The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2018
Filed:
Dec. 01, 2009
Applicant:
Teruo Haibara, Yamaguchi, JP;
Inventor:
Teruo Haibara, Yamaguchi, JP;
Assignee:
SILTRONIC AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/00 (2006.01); H01L 21/02 (2006.01); B08B 3/10 (2006.01); B08B 3/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0209 (2013.01); B08B 3/003 (2013.01); B08B 3/102 (2013.01); B08B 3/12 (2013.01); H01L 21/02052 (2013.01);
Abstract
A wax removal method uniformly removes wax adhering to a wafer surface and reduces the problems of re-adhesion of particles and filter clogging of a cleaning bath during cleaning. The method uses cleaning liquid which contains microbubbles.