The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2018
Filed:
Nov. 10, 2017
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventor:
Dirk Woll, San Jose, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/35 (2006.01); G02B 27/09 (2006.01); G02F 1/355 (2006.01); H01S 3/00 (2006.01);
U.S. Cl.
CPC ...
G02F 1/353 (2013.01); G02B 27/09 (2013.01); G02F 1/3501 (2013.01); G02F 1/3551 (2013.01); G02F 2001/3503 (2013.01); G02F 2001/3505 (2013.01); H01S 3/005 (2013.01); H01S 3/0092 (2013.01);
Abstract
A system includes a nonlinear crystal positioned such that a focus of a laser beam is outside the nonlinear crystal in at least one plane perpendicular to a beam propagation direction of the laser beam. The nonlinear crystal is disposed in a crystal mount assembly. A laser beam may be directed at the nonlinear crystal for wavelength conversion. The system may be used as a deep-UV wavelength converter.