The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2018
Filed:
Jul. 31, 2017
Mitutoyo Corporation, Kanagawa, JP;
Shinichi Hara, Ibaraki, JP;
MITUTOYO CORPORATION, Kanagawa, JP;
Abstract
A laser interferometer that includes a laser interferometer, an position sensitive detector detecting an offset of an optical axis of the laser interferometer, a biaxial rotator turning the laser interferometer toward an arbitrary direction, an angle sensor detecting a rotation angle of the biaxial rotator, a retro reflector reflecting reflected light in a direction parallel to incident light, and a controller performing feedback control of the biaxial rotator so as to track the retro reflector based on signals from the position sensitive detector and the angle sensor. The tracking-type laser interferometer starts tracking control when return light from the retro reflector is returned to a detection range of the position sensitive detector, and changes gain for the feedback control in accordance with a behavior for a position of the return light on the position sensitive detector due to the tracking control.