The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2018
Filed:
Aug. 31, 2015
Applicant:
Toshiba Memory Corporation, Tokyo, JP;
Inventors:
Yoshihisa Kawamura, Mie, JP;
Masayuki Hatano, Kanagawa, JP;
Yohko Komatsu, Kanagawa, JP;
Hiroyuki Kashiwagi, Kanagawa, JP;
Assignee:
Toshiba Memory Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 33/42 (2006.01); H01L 21/02 (2006.01); B29C 43/02 (2006.01); B29C 43/36 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); B29L 31/34 (2006.01);
U.S. Cl.
CPC ...
B29C 33/424 (2013.01); B29C 43/021 (2013.01); B29C 43/36 (2013.01); H01L 21/02118 (2013.01); H01L 21/02318 (2013.01); H01L 21/02348 (2013.01); B29C 2033/426 (2013.01); B29C 2043/025 (2013.01); B29L 2031/34 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); Y10S 977/887 (2013.01);
Abstract
According to one embodiment, a template includes a template pattern and a liquid repellent pattern. The template pattern is formed on a substrate. The liquid repellent pattern has liquid repellency to a resist and are disposed on a periphery of a region for arrangement of the template pattern.