The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2018
Filed:
Aug. 15, 2013
Asml Netherlands B.v., Veldhoven, AH, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Mark Marcus Gerardus Heeren, Eersel, NL;
Peter Michel Silvester Maria Heijmans, Weert, NL;
Jacob Jan Velten, Eindhoven, NL;
Johannes Hubertus Antonius Van De Rijdt, Gemert, NL;
Godfried Katharina Hubertus Franciscus Geelen, Echt, NL;
Abdelhamid Kechroud, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An electromagnetic actuator includes a coil assembly including a coil; a magnet assembly including a first and a second magnet unit, each magnet unit including a magnetic yoke and a plurality of permanent magnets mounted to the magnetic yoke, the first and second magnet unit forming a magnetic circuit for receiving the coil assembly and, upon energizing the coil, generating a force in a first direction; and a holder for holding the magnet units, wherein a weight ratio of the magnet assembly over the coil assembly is smaller than the weight ratio of the magnet assembly over the coil assembly when the ratio of force over electrical power is maximized.