The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2018
Filed:
May. 07, 2015
Asml Netherlands B.v., Veldhoven, NL;
Günes Nakiboglu, Eindhoven, NL;
Mark Constant Johannes Baggen, Eindhoven, NL;
Gerard Johannes Boogaard, Zaltbommel, NL;
Nicolaas Rudolf Kemper, Eindhoven, NL;
Sander Kerssemakers, Eindhoven, NL;
Robertus Mathijs Gerardus Rijs, Sevenum, NL;
Frank Johannes Jacobus Van Boxtel, Eindhoven, NL;
Erwin Antonius Henricus Franciscus Van Den Boogaert, Someren, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Martinus Van Duijnhoven, Deurne, NL;
Jessica Henrica Anna Verdonschot, Leende, NL;
Hendrikus Herman Marie Cox, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus has a compartment which accommodates a movable object. Movements of the movable object cause acoustic disturbances in the compartment. An acoustic damper is arranged to damp the acoustic disturbances in the compartment and comprises a chamber () in communication with the compartment and a perforated plate (), having a plurality of through-holes (), between the chamber and the compartment.