The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2018
Filed:
Nov. 06, 2015
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
David E. Suuronen, Newburyport, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
A system and method for monitoring the temperature of a platen and a workpiece disposed on that platen is disclosed. Since the platen is a dielectric material, its properties, such as resistivity and conductivity, may change as a function of temperature. By understanding the relationship between these parameters and temperature, it may be possible to indirectly determine the temperature of the platen. For example, the platen may be in electrical communication with a power supply, which provides a clamping voltage for the workpiece. By monitoring the current waveform associated with the clamping voltage, it is possible to determine changes in the characteristics of the platen. Based on these changes, the temperature of the platen may be calculated.